| 摘要 |
<p>The present invention obtains an adsorption nozzle elevating gear and a load control method thereof, capable of loading electronic parts by exact loads. The elevating gear comprises: a first elevating drive member, configured to elevate a movable body; a second elevating drive member, configured to elevate an adsorption nozzle on the movable body; a spline conformation part, configured to elevate and rotate the adsorption nozzle; a load detection unit, configured to detect the load of the adsorption nozzle; and an action control unit, configured to perform the following control: preparation load set control of controlling the second elevating drive member so as to detect a first target load by the load detection unit; load maintenance control of performing feedback control to the second elevating drive member based on the detection load so as to maintain the first target load and lifting down the movable body simultaneously; and load control of judging that a substrate is arrived, and ending the load after a presetting load application time from start of arriving at the substrate.</p> |
