| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of testing a semiconductor device capable of efficiently detecting a soft open failure and easily checking the current characteristics of a defective element single body.SOLUTION: In a method of testing a semiconductor device according to one embodiment, a semiconductor device 1 including a plurality of ring oscillators RO as test circuits 10 is prepared, and power supply current, which flows through the ring oscillators RO when each of the ring oscillators RO is sequentially brought into an oscillation state, is measured. In addition, for one of the ring oscillators RO through which the power supply current different from the one in a normal state flows, the current voltage characteristics of a PMOS transistor and NMOS transistor that constitute each of CMOS inverters INV0 to INV31 that are included in the ring oscillator RO are individually measured. |
