ADHERING DEVICE, ADHERING SYSTEM, AND ADHERING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an adhering device capable of improving adhesion accuracy when an adhesion member is adhered to a substrate.SOLUTION: The adhering device comprises: a chamber C; a member holding mechanism provided in the chamber C and holding the adhesion member; a chamber transfer mechanism 18 for moving the chamber C; and a mechanism for vacuum exhausting inside of the chamber and supplying low-molecule gas in the chamber C. The adhering device adheres the adhesion member held by the member holding mechanism to a substrate S held by a substrate holding mechanism in the chamber C inside of which is vacuum exhausted, or in the chamber C to inside of which the low molecule gas is supplied.