发明名称 |
Dressing method, method of determining dressing conditions, program for determining dressing conditions, and polishing apparatus |
摘要 |
A method dresses a polishing member with a diamond dresser having diamond particles arranged on a surface thereof. The method includes determining dressing conditions by performing a simulation of a distribution of a sliding distance of the diamond dresser on a surface of the polishing member, and dressing the polishing member with the diamond dresser under the determined dressing conditions. The simulation includes calculating the sliding distance corrected in accordance with a depth of the diamond particles thrusting into the polishing member. |
申请公布号 |
US8655478(B2) |
申请公布日期 |
2014.02.18 |
申请号 |
US20090566224 |
申请日期 |
2009.09.24 |
申请人 |
FUKUDA AKIRA;MOCHIZUKI YOSHIHIRO;WADA YUTAKA;SHIOKAWA YOICHI;HIYAMA HIROKUNI;EBARA CORPORATION |
发明人 |
FUKUDA AKIRA;MOCHIZUKI YOSHIHIRO;WADA YUTAKA;SHIOKAWA YOICHI;HIYAMA HIROKUNI |
分类号 |
G06F19/00;B24B1/00;B24B49/00;B24B53/00;B24B53/017;B24B53/02;G01D1/00;G05B11/01;G05B19/18;H01L21/304 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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