发明名称 Access transistor for memory device
摘要 An access transistor for a resistance variable memory element and methods of forming the same are provided. The access transistor has first and second source/drain regions and a channel region vertically stacked over the substrate. The access transistor is associated with at least one resistance variable memory element.
申请公布号 US8652903(B2) 申请公布日期 2014.02.18
申请号 US20100730611 申请日期 2010.03.24
申请人 DALEY JON;CAMPBELL KRISTY A.;BROOKS JOSEPH F.;MICRON TECHNOLOGY, INC. 发明人 DALEY JON;CAMPBELL KRISTY A.;BROOKS JOSEPH F.
分类号 H01L21/8239 主分类号 H01L21/8239
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