GROUP 13 ELEMENT NITRIDE SUBSTRATE AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a group 13 element nitride substrate having a non-polar surface or a semi-polar surface as a principal surface and an orientation-flat edge face having small surface roughness and a method for producing the same.SOLUTION: A group 13 element nitride substrate having a principal surface and an orientation-flats in which the principal surface is the surface inclined from a {1-100} plane to the <0001> direction at an angle of 0° to 30°, the orientation-flat forms a straight line extending in the direction parallel to the <11-20>±5° direction on the [000-1] side of the principal surface, and the surface roughness Ra of the orientation-flat edge face is 0.5 μm to 3.0 μm.