| 发明名称 |
VARIABLE FREQUENCY MICROWAVE DEVICE AND METHOD FOR RECTIFYING WAFER WARPAGE |
| 摘要 |
A variable frequency microwave (VFM) device and a method for rectifying wafer warpage are provided. The variable frequency microwave (VFM) device includes a heater installed in the top wall of the chamber; and a cooler installed in proximity to the bottom wall of the chamber. |
| 申请公布号 |
US2014042152(A1) |
申请公布日期 |
2014.02.13 |
| 申请号 |
US201213569468 |
申请日期 |
2012.08.08 |
| 申请人 |
HU YEN-CHANG;HSIAO CHING-WEN;CHEN CHEN-SHIEN;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
HU YEN-CHANG;HSIAO CHING-WEN;CHEN CHEN-SHIEN |
| 分类号 |
H05B6/64 |
主分类号 |
H05B6/64 |
| 代理机构 |
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