| 摘要 |
PROBLEM TO BE SOLVED: To provide a glow discharge emission analysis method which can highly accurately analyse any one of a sample primarily containing carbon and a carbon/inorganic multi-layer film sample in an extremely short time.SOLUTION: The glow discharge emission analysis method including sputtering, by glow discharge, a sample 5 which is either one of a sample primarily containing carbon, and a carbon/inorganic multi-layer film sample formed by stacking at least each one of a film primarily containing carbon and a film composed of an inorganic compound not primarily containing carbon and metal, to thereby analyse the sample 5. A mixed gas G3 of an inert gas G1 and a hydrogen gas G2 is used for discharge gas, and analysis is performed based on the intensity of light L inherent in analysis target element, generated from the sample 5 by glow discharge. |
