发明名称 |
RESIST PATTERN FORMATION METHOD AND RESIST COMPOSITION FOR NEGATIVE-WORKING IMAGE DEVELOPMENT |
摘要 |
<p>A method of forming a resist pattern including: forming a resist film on a substrate using a resist composition containing a base component (A) which exhibits decreased solubility in an organic solvent by action of an acid; exposing the resist film; and patterning by a negative-tone development using a developing solution containing the organic solvent, wherein the base component (A) contains a resin component (A1) having a structural unit (a0) which generates acid upon exposure and a structural unit (a1) derived from an acrylate ester which may have the hydrogen atom bonded to the carbon atom on the alpha-position substituted with a substituent and contains an acid decomposable group which exhibits increased polarity by the action of acid, and the developing solution contains a nitrile solvent.</p> |
申请公布号 |
KR20140018269(A) |
申请公布日期 |
2014.02.12 |
申请号 |
KR20137025472 |
申请日期 |
2012.03.07 |
申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
HIRANO TOMOYUKI;TAKAKI DAICHI;SHIONO DAIJU;KONNO KENRI;TAKAGI ISAMU |
分类号 |
G03F7/039;C08F220/28;C08F220/38;G03F7/038;G03F7/30;H01L21/027 |
主分类号 |
G03F7/039 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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