| 摘要 |
PURPOSE: A photo resist stripping apparatus is provided to increase a stripping effect by generating bubbles and ultrasonic waves in stripping liquor. CONSTITUTION: An ultrasonic wave generator (14) is included on the bottom surface of a water tub. A stripper comprises a bubble generator. The stripper strips photo resist which is coated on a panel. A filter (20) filters stripping liquor. A circulator (30) calculates the filtered stripping liquor to the water tub again. |
