发明名称 |
APPARATUS AND METHOD FOR CRYSTAL GROWTH |
摘要 |
An apparatus for vapour phase crystal growth comprising an envelope assembly with a one source module defining at least one source volume, a growth module defining at least one growth volume, and a manifold module defining at least one manifold volume. The source module, manifold module and growth module are configured co-operably to define a fluidly continuous envelope volume including a flow restrictor between the source volume and the growth volume. A vacuum vessel containing one or more of the envelope assemblies. An evacuator to evacuate the vacuum vessel. A fluid communication path between the envelope volume and the vacuum vessel associated with each source volume at a location on the source volume side of its associated flow restrictor. A closure mechanism is configured to restrict the fluid communication path between each source volume and the vacuum vessel. A method of employing such an apparatus is also disclosed. |
申请公布号 |
EP2694706(A1) |
申请公布日期 |
2014.02.12 |
申请号 |
EP20120717816 |
申请日期 |
2012.04.03 |
申请人 |
KROMEK LIMITED |
发明人 |
ROBINSON, MAX;MULLINS, JOHN TOMLINSON |
分类号 |
C30B23/00;C30B29/48;H01L21/02 |
主分类号 |
C30B23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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