| 摘要 |
PROBLEM TO BE SOLVED: To provide a scratch detection sensitivity adjustment method, a magnetic particle inspection method and a magnetic particle inspection device in a magnetic particle inspection in which time is not taken for adjustment of scratch detection sensitivity.SOLUTION: Magnetic particles are adhered to an analyte 20 for sensitivity adjustment, which is provided with a reference defect 7 for the sensitivity adjustment, and conveyed on a continuous line 1. A part which is provided with the reference defect 7 for the sensitivity adjustment of the analyte 20 for the sensitivity adjustment is magnetized by a magnetization part 4, and irradiated with ultraviolet rays by an ultraviolet irradiation lamp 5. Then, since magnetic particle patterns corresponding to the reference defect 7 for the sensitivity adjustment is formed, a part to be inspected, on which the magnetic particle patterns are formed is picked up with an ultraviolet camera 6. An image picked up with the ultraviolet camera 6 is transmitted to an image processing part 8, and the reference defect 7 for the sensitivity adjustment is detected from the magnetic particle patterns of the image. A sensitivity adjustment part 9 adjusts magnetization intensity and/or illuminance of the part to be inspected so that detection sensitivity of the magnetic particle patterns when the reference defect 7 for the sensitivity adjustment is detected on the basis of a detection result becomes the optimal value. |
