PHOTORESIST MANAGEMENT DEVICE AND METHOD

摘要

This photoresist management device contains: a first event processor for, upon receiving a first message expressing that a photoresist container is empty and originating from a semiconductor fabrication tool, requesting and obtaining data pertaining to the empty photoresist container from a wireless tag reader, and transmitting the data to a host; a second event processor for, upon receiving a second message containing data pertaining to a photoresist container removed from the semiconductor fabrication tool and originating from the wireless tag reader, transmitting the data pertaining to the removed photoresist container to the host; and a third event processor for, upon receiving a third message containing data pertaining to a photoresist container newly positioned in the location of the photoresist container that was removed from the semiconductor fabrication tool, transmitting the data pertaining to the newly positioned photoresist container to the host.