发明名称 Method for manufacturing solar cell using a single target
摘要 Methods for manufacturing a solar cell are provided. The method may include forming a lower electrode on a substrate, forming a light absorption layer on the lower electrode, forming a buffer layer on the light absorption layer, and forming a window layer on the buffer layer. The window layer may include an intrinsic layer and the transparent electrode which have electric characteristics different from each other, respectively. The intrinsic layer and the transparent electrode may be formed by a sputtering process using a single target formed of metal oxide doped with impurities.
申请公布号 US8647916(B2) 申请公布日期 2014.02.11
申请号 US201213530370 申请日期 2012.06.22
申请人 KIM KYUNG HYUN;KIM JE HA;CHOI HAE-WON;CHO DAE-HYUNG;CHUNG YONG-DUCK;ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 KIM KYUNG HYUN;KIM JE HA;CHOI HAE-WON;CHO DAE-HYUNG;CHUNG YONG-DUCK
分类号 H01L21/00 主分类号 H01L21/00
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