发明名称 THERMAL TREATMENT APPARATUS AND THERMAL TREATMENT METHOD
摘要 PROBLEM TO BE SOLVED: To provide a thermal treatment apparatus and a thermal treatment method capable of heating a workpiece under required conditions regardless of the type of a base material.SOLUTION: A strip workpiece 8 is transported at a constant speed from a feed roller 11 to a take-up roller 12 by roll-to-roll system. The workpiece 8 is obtained by laminating a functional layer of nanoink, or the like, on the surface of a base material of resin, such as PEN. When irradiating the surface of the workpiece 8 with light from the xenon lamp 21 of a main heating light source 20, while transporting the workpiece 8 at a constant speed, each position on the surface of the workpiece 8 is irradiated with light for a short time. Consequently, only the functional layer 82 can be heated to a required temperature, without heating the base material 81 poor in heat resistance excessively.
申请公布号 JP2014027252(A) 申请公布日期 2014.02.06
申请号 JP20130009870 申请日期 2013.01.23
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 KIMURA TAKAHIRO;SHIBUTA KOJI;KUWATA YUTAKA
分类号 H01L21/26;F27B9/24;F27B9/36;F27D11/02;H01L21/28 主分类号 H01L21/26
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