发明名称 INTRACAVITY LOSS ELEMENT FOR POWER AMPLIFIER
摘要 A regenerative ring resonator In the path of a light beam includes a discharge chamber having electrodes and. a gain medium between the electrodes; an optical, coupler; and an attenuation optical system. The optical coupler is partially reflective so that at least a portion of a light beam impinging on the optical coupler from the discharge chamber is reflected back through the discharge chamber and at least a portion of the light beam impinging on the optical coupler from the discharge chamber is transmitted through the optical coupler, The attenuation optical system is in the path of the light beam within the resonator, and has a plurality of distinct attenuation states. Each attenuation state defines a distinct attenuation factor applied to the light beam to provide adjustment of an energy of the: light beam.
申请公布号 WO2014022160(A2) 申请公布日期 2014.02.06
申请号 WO2013US51725 申请日期 2013.07.23
申请人 CYMER, LLC 发明人 RAFAC, ROBERT, J.;MELCHIOR, JOHN, T.;ROKITSKI, ROSTISLAVA
分类号 G21K5/02;H01S3/10 主分类号 G21K5/02
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