| 摘要 |
A method of forming a low-resistance, high-reliability through/embedded electrode is provided, where the electrode can be arranged in a higher density according to the miniaturization of the semiconductor manufacturing technology. This method includes the step of filling an opening 51 of a substrate 50 with a paste 56 of a first conductive material and drying the paste 56; the step of solid-phase sintering the paste 56 filled in the opening 51, generating a first porous conductor 57; the step of applying a paste of a second conductive material so as to cover the first conductor 57; and the step of melting the paste of the second conductive material by heat treatment, impregnating the second conductive material into the first conductor 57. |
