发明名称 Tape residue-free bump area after wafer back grinding
摘要 Organic-adhesive tapes are often used to secure and protect the bumps during wafer processing after bump formation. While residual organic-adhesive tape may remain on the wafer after tape de-lamination, applying a bump template layer on the bumps before laminating the tape allows any residue to be removed afterwards and results in a residue-free wafer.
申请公布号 US8642390(B2) 申请公布日期 2014.02.04
申请号 US20100726317 申请日期 2010.03.17
申请人 WANG CHUNG YU;WANG JIANN-JONG;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 WANG CHUNG YU;WANG JIANN-JONG
分类号 H01L21/00;H01L21/46 主分类号 H01L21/00
代理机构 代理人
主权项
地址