发明名称 |
PROBE FIXING STRUCTURE AND OPTICAL MEASURING DEVICE THEREOF |
摘要 |
PROBLEM TO BE SOLVED: To provide a probe fixing structure and its optical measuring device.SOLUTION: A probe fixing structure is provided with a substrate and a plurality of fixing modules. The substrate has a hole and groove parts placed around a plurality of holes. The fixing modules join the groove parts and have fixing units and a plurality of probes. The fixing units join the groove parts. The probes go through the groove part and are connected to the fixing units. An optical measuring device comprises a combination of a probe fixing structure and a lens adjustment mechanism having lens, and is used for measuring electrical characteristics of a chip. |
申请公布号 |
JP2014022726(A) |
申请公布日期 |
2014.02.03 |
申请号 |
JP20130139847 |
申请日期 |
2013.07.03 |
申请人 |
MJC PROBE INC |
发明人 |
CHANG CHIA-TAI;TSAI CHIN-YI;CHEN CHIU-KUEI;YU CHEN-CHIH;LAI CHIEN-CHANG;YANG CHIN-TIEN;YANG HUI-PIN;CHANG KENG-SHIENG;HUANG YUN-RU |
分类号 |
H01L21/66;G01R1/073;G01R31/26 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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