发明名称 PROBE UNIT AND SUBSTRATE INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To prevent damage or adhesion of a foreign object to a probe, and exchange the probe easily.SOLUTION: The device includes a plurality of probes 11, a tip section side support section 31 for supporting a tip section 21 side of the probe 11, and a base end section support section 32 for supporting a base end section 23 side of the probe 11. The probe 11 has the tip section 21 formed to be smaller in the diameter than an intermediate section 22 and the base end section 23; the tip section side support section 31 includes a first support plate 41 and a second support plate 42 each having a first insertion hole 51 and a second insertion hole 52 in which the intermediate section 22 and the base end section 23 can be inserted; and the second support plate 42 is so configured as to be relatively slidable against the first support plate 41 between a first position P1 where the intermediate section 22 and the base end section 23 can be inserted into both of the first insertion hole 51 and the second insertion hole 52 and a second position where only the tip section 21 can be inserted into both of the first insertion hole 51 and the second insertion hole 52.
申请公布号 JP2014021059(A) 申请公布日期 2014.02.03
申请号 JP20120162873 申请日期 2012.07.23
申请人 HIOKI EE CORP 发明人 KOBAYASHI MASASHI
分类号 G01R1/073;H01L21/66 主分类号 G01R1/073
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