SEMICONDUCTOR PHYSICAL QUANTITY SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor physical quantity sensor capable of preventing degradation of sensitivity of a light receiving element.SOLUTION: A semiconductor physical quantity sensor 10 has a semiconductor substrate 20 formed with a cavity 21 and a dielectric thin plate 61 disposed over the cavity 21 and comprises: a dielectric member 60 fixed to one side 20a of the semiconductor substrate 20; and a light receiving element 40 disposed over the dielectric thin plate 61. The dielectric member 60 is partially fixed to the semiconductor substrate 20 by a fixing portion 62 formed in a part of the dielectric member 60 so as to form a space S between the one side 20a of the semiconductor substrate 20 and one surface 61a of the dielectric thin plate 61.