METHOD AND DEVICE FOR CHARGED PARTICLE BEAM INSPECTION

摘要

PROBLEM TO BE SOLVED: To provide charged particle beam inspection technology in which throughput is improved, capable of reducing the time required for a discharge by simplifying a discharge operation and performing a plurality of types of inspections by one inspection device.SOLUTION: A charged particle beam inspection device 71 includes: a stage 29 for mounting a sample S, a charged particle beam source for irradiating charged particle beams on the sample S; a detection device 47 for detecting a signal obtained from the sample S; an image processing section 61 for forming an image from the signal from the detection device 47; an energy control section 65 for controlling the beam energy of the charged particle beams irradiated on the sample S; a main chamber 11 for holding the sample S under inspection in a vacuum state; a carrier robot 27 for carrying the sample S to the main chamber 11; a carrier chamber 9 for holding the carrier robot 27 in a vacuum state; and a discharge device 73 provided inside the carrier chamber 9.