METHOD FOR PRODUCING FILMS of garnet ferrite CONTAINING Bi, with a given surface roughness

摘要

A method for producing films of garnet ferrite containing Bi with a given surface roughness includes a target producing which contains garnet ferrite components comprising Bi, the target components spraying on substrate from a nonmagnetic garnet, annealing the produced film at a temperature of crystallization of garnet ferrite in air at atmospheric pressure. In addition, the heating rate of the film to the crystallization temperature of the ferrite-garnet is set between 2 and 40 °C/min.