| 发明名称 |
ORGANIC AMINODISILANE PRECURSOR AND METHOD FOR DEPOSITING FILM CONTAINING THE SAME |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a precursor and a method for forming a silicon-containing film.SOLUTION: An organic aminodisilane precursor is represented by the following formula I and has an Si-N bond, an Si-Si bond, and an Si-H3 group. |
| 申请公布号 |
JP2014013889(A) |
申请公布日期 |
2014.01.23 |
| 申请号 |
JP20130117293 |
申请日期 |
2013.06.03 |
| 申请人 |
AIR PRODUCTS AND CHEMICALS INC |
发明人 |
XIAO MANCHAO;LEI XINJIAN;SPENCE DANIEL P;HAIRPIN CHANDRA;HAN BING;MARC O'NEAL LEONARD;MAYORGA STEVEN GERARD;ANUPAMA MALLIKARJUNAN |
| 分类号 |
H01L21/318;C07F7/02 |
主分类号 |
H01L21/318 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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