| 摘要 |
PROBLEM TO BE SOLVED: To provide a cantilever type probe assembly capable of increasing allowable current while coping with narrowing of electrode pitches, and to provide a probe card or a probe unit equipped with the probe assembly.SOLUTION: A cantilever type probe includes two or more connection members arranged in a vertical direction with intervals. A cantilever type probe assembly has a plurality of cantilever type probes aligned with a position in a vertical direction of the connection members aligned. In the cantilever type probe assembly, a wider connection member in one cantilever type probe and a narrow connection member in a neighboring cantilever type probe are arranged in the same position in the vertical direction. A probe card or a probe unit is equipped with the cantilever type probe assembly. |
