发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <p>Disclosed herein is a semiconductor device including: an insulating film configured to be provided on a substrate and be porosified through decomposition and removal of a pore-forming material; a covering insulating film configured to be provided on the insulating film; and conductive layer patterns configured to be provided in the covering insulating film and the insulating film and reach the substrate, wherein the insulating film includes a non-porous region in which the pore-forming material remains.</p>
申请公布号 KR101354126(B1) 申请公布日期 2014.01.22
申请号 KR20070088353 申请日期 2007.08.31
申请人 发明人
分类号 H01L21/28 主分类号 H01L21/28
代理机构 代理人
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