摘要 |
A semiconductor device may include, but is not limited to: a semiconductor substrate; a first insulating film; a conductive film; and a semiconductor film. The semiconductor substrate has a first hole. The semiconductor substrate has a first region into which a first impurity is introduced. The first region is adjacent to a side surface of the first hole. The first insulating film covers at least the side surface and a bottom surface of the first hole. The first insulating film has a second hole adjacent to the side surface of the first hole. The conductive film fills a bottom portion of the first hole. The semiconductor film is positioned over the conductive film. The semiconductor film fills the second hole and is in contact with the first region. |