摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device capable of suppressing temperature variation while suppressing an increase in size.SOLUTION: A semiconductor device includes: a nitride semiconductor layer 12 provided on a substrate 10; an active region 17 and an inactive region 19 provided in the nitride semiconductor layer 12; a hole 20 provided in a region of the substrate 10 corresponding to the active region 17; and a member 26 provided in the hole 20. The thermal time constant per unit volume of the member 26 is larger than that of the substrate 10. |