| 摘要 |
PROBLEM TO BE SOLVED: To perform from preparation of a thin sample to inspection thereof without mounting and carrying the sample.SOLUTION: A sample is supported in a sample chamber by a manipulator, a first ptychographic image is derived from a diffraction pattern of the sample obtained by an electron microscope and a first electron microscope image, and a layer of the sample is removed by a focused ion beam to derive a second electron microscope image, thereby obtaining a second ptychographic image. Further, 3D image reconstruction is performed by varying the orientation of a thin sample piece in various directions to obtain a plurality of ptychographic images. |
