SHAPE MEASUREMENT DEVICE, AND METHOD FOR CONTROLLING SHAPE MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce a probe deviation to be generated by the delay of feed-forward processing.SOLUTION: A shape measurement device includes: an amplifier 313 for controlling the drive of a servo motor 208 to allow a stage part to move in a Z direction by a movement amount corresponding to a movement command m receiving an input; and an arithmetic unit 312 for obtaining a movement command m. The arithmetic unit 312 performs processing to calculate a temporary movement command mfor performing compensation to cancel a difference &Dgr;d between a detected pressing pressure dand a target pressing pressure dand processing to calculate an acceleration α obtained by carrying out second order differentiation of a scan position command P. The arithmetic unit 312 also performs processing to estimate a displacement amount min a Z direction of a probe at a position corresponding to a scan position command P on the basis of an inclination angle &thetas; and an acceleration α on an ideal front surface being the ideal shape of a front surface of a measured object. Then, the arithmetic unit 312 performs processing to acquire a movement command m by adding a displacement amount mto a temporary movement command m.