| 摘要 |
PROBLEM TO BE SOLVED: To obtain a method of manufacturing a solar battery, capable of manufacturing a selective emitter type solar battery by which a high conversion efficiency can be obtained, with stability and good reproductivity by a simple process.SOLUTION: A method of manufacturing a solar battery includes: an impurity diffusion step of selectively diffusing an impurity in a pattern-shape region of an impurity diffusion layer 6 to form a high concentration diffusion layer 7, as a diffusion layer formation step of forming the impurity diffusion layer 6 to a semiconductor substrate 1; a high concentration diffusion layer detection step of detecting a position where the high concentration diffusion layer 7 is formed in the impurity diffusion layer 6; and a light-receiving surface side electrode formation step of forming a light-receiving surface side electrode 3 on the high concentration diffusion layer 7. The high concentration diffusion layer detection step includes: a detection light supply step of supplying detection light to the impurity diffusion layer 6 after the impurity diffusion step; and a determination step of measuring a reflective index of the detection light at the impurity diffusion layer 6, and determining whether or not the high concentration diffusion layer 7 is formed at a position where the detection light is reflected, depending on the reflective index. |
