METHOD AND APPARATUS FOR REMOVING CONTAMINANTS FROM NITROGEN TRIFLUORIDE

摘要

PROBLEM TO BE SOLVED: To efficiently provide a highly pure nitrogen fluoride process fluid having an impurity content of 10 ppm or less.SOLUTION: A method for purifying a process fluid comprising nitrogen fluoride and one or more contaminants comprises the step of irradiating the fluid with light, the light including a frequency that is absorbed by the one or more contaminants, so that one or more chemical bonds of the one or more contaminants dissociate to form dissociation products.