发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SAME
摘要 A semiconductor device manufacturing method includes forming a film on at least a portion of one surface of a semiconductor wafer, forming an alignment mark by providing a recessed portion on the film, and adhering a sheet to the one surface of the semiconductor wafer on which the alignment mark is formed.
申请公布号 US2014015150(A1) 申请公布日期 2014.01.16
申请号 US201313933621 申请日期 2013.07.02
申请人 YATSUSHIRO TERUHIKO;TOYOTA JIDOSHA KABUSHIKI KAISHA 发明人 YATSUSHIRO TERUHIKO
分类号 H01L23/544;H01L21/02 主分类号 H01L23/544
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