SHAPE-MEASURING DEVICE, SYSTEM FOR MANUFACTURING STRUCTURE, SHAPE-MEASURING METHOD, METHOD FOR MANUFACTURING STRUCTURE AND SHAPE-MEASURING PROGRAM

摘要

PROBLEM TO BE SOLVED: To reduce the degree of lowering in accuracy of shape measurement.SOLUTION: A shape-measuring device includes: a light-projecting part for projecting light flux having some intensity distribution to a measuring object; a control part for controlling coherency of the light flux on the basis of information to be inputted; an imaging part for generating a picked-up image obtained by imaging the surface of the measuring object on which the light flux is projected; and a measurement part for measuring a shape of the surface on the basis of a position of the light flux contained in the picked-up image generated by the imaging part.