发明名称 ORGANIC MATTER FEEDIGN APPARATUS AND METHOD
摘要 The present invention relates to an organic matter feeding apparatus which is capable of reducing charging time of an organic matter inside a crucible used in a deposition process. According to the present invention, provided is an organic matter feeding apparatus comprising: a shaft part for connecting a cylinder part and a piston part; the cylinder part arranged on one side outside of the shaft for storing an organic matter which will be charged in the crucible; and a piston part equipped inside the shaft part to charge the organic matter stored in the cylinder part by dropping the organic matter to the crucible by a reciprocating motion toward the cylinder part due to a power transmission device. The organic matter feeding apparatus is capable of reducing charging time of an organic matter inside a crucible since the organic matter can be correctly charged inside the crucible without replacing the crucible. [Reference numerals] (160) Motor part; (AA) Pressure
申请公布号 KR20140005435(A) 申请公布日期 2014.01.15
申请号 KR20120072589 申请日期 2012.07.04
申请人 SUNIC SYSTEM. LTD. 发明人 KIM, SU BIN
分类号 C23C14/24;C23C14/12 主分类号 C23C14/24
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