SUCTION CHUCK, AND TRANSFER DEVICE OF WORKPIECE INCLUDING SAME

摘要

Provided is a suction chuck that is lightweight and that sucks and releases a thin plate workpiece in such a manner that the thin plate workpiece is not in contact with an edge of the chuck. A suction chuck according to an embodiment of the present invention includes a main body having a flat plate shape, and an opposing surface. Compressed air passages are formed within the main body. The opposing surface is a surface of the main body at the side facing the workpiece. The opposing surface has a plurality of recesses formed therein. The plurality of recesses serve as a sucking element for generating a negative pressure by ejecting the compressed air. The opposing surface is formed with a shape similar to the shape of the workpiece (or with a shape that corresponds to the shape of the workpiece being offset outward) such that the shape of the opposing surface is able to completely cover the shape of the workpiece when seen along a direction perpendicular to the opposing surface. The recesses are arranged such that all of the recesses are coverable by the shape of the workpiece when seen along the direction perpendicular to the opposing surface.