发明名称 FABRICATION EQUIPMENT MONITORING DEVICE AND MONITORING METHOD
摘要 Provided is a fabrication equipment monitoring device which monitors, by a server and portable terminals which are capable of communicating with the server, fabrication equipment located inside a factory. When an image capture element of a portable terminal is faced toward fabrication equipment, the fabrication equipment is identified on the basis of location information acquired by a location information acquisition means, direction information which is detected by a direction detection means, an angle of view of the image capture element, and layout information. Fabrication equipment information of the identified fabrication equipment is extracted from a storage means, and at least a portion of the extracted fabrication equipment information is displayed in a display means.
申请公布号 WO2014006884(A1) 申请公布日期 2014.01.09
申请号 WO2013JP04101 申请日期 2013.07.02
申请人 TOKYO ELECTRON LIMITED 发明人 YAMAJI, KANAME;UOYAMA, KAZUYA;MORITA, YASUYUKI;MIYATAKE, HIROAKI
分类号 H01L21/02;G05B19/418 主分类号 H01L21/02
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