发明名称 SEMICONDUCTOR CONSTRUCTIONS AND METHODS OF FORMING SEMICONDUCTOR CONSTRUCTIONS
摘要 Some embodiments include methods in which first insulative material is formed across a memory region and a peripheral region of a substrate. An etch stop structure is formed to have a higher portion over the memory region than over the peripheral region. A second insulative material is formed to protect the lower portion of the etch stop structure, and the higher portion is removed. Subsequently, at least some of the first and second insulative materials are removed. Some embodiments include semiconductor constructions having a first region with first features, and a second region with second features. The first features are closer spaced than the second features. A first insulative material is over the second region and an insulative structure is over the first insulative material. The structure has a stem joined to a bench. The bench has an upper surface, and the stem extends to above the upper surface.
申请公布号 US2014008807(A1) 申请公布日期 2014.01.09
申请号 US201314017939 申请日期 2013.09.04
申请人 MICRON TECHNOLOGY, INC. 发明人 LIU ZENGTAO T.
分类号 H01L23/482 主分类号 H01L23/482
代理机构 代理人
主权项
地址