DETECTION ELEMENT, DETECTION MODULE, IMAGING DEVICE, DETECTION IMAGING MODULE, ELECTRONIC APPARATUS, TERAHERTZ CAMERA, AND METHOD FOR MANUFACTURING DETECTION ELEMENT

摘要

PROBLEM TO BE SOLVED: To solve such a problem that it is difficult to increase productivity and efficiency in a conventional detection element.SOLUTION: A detection element includes: a detection part 52 whose characteristics change in accordance with the amount of absorbed electromagnetic waves; a substrate 53 which supports the detection part 52; a cavity part 67 which is provided in a region overlapped on the detection part 52 in the substrate 53; and a hole 58 which penetrates through the substrate 53 from the side opposite to the detection part 52 side of the substrate 53 to be communicated with the cavity part 67. An aperture area of the hole 58 is smaller than that of the cavity part 67.