| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a ceramic multilayer substrate capable of manufacturing a ceramic multilayer substrate of excellent dimensional accuracy, by suppressing deformation of a frame formed around a cavity.SOLUTION: A frame-like ceramic green sheet 43 having through holes 55, 56 formed therein and becoming cavities is laminated on the front and back surfaces of a planar ceramic green sheet 43 with a bonding ceramic sheet 46 interposed therebetween. The bonding ceramic sheet 46 is heated to a temperature equal to or higher than the melting point of an organic compound, so as to express adhesion. An unbaked ceramic laminate 59, where respective ceramic green sheets 43 are integrated with the bonding ceramic sheet 46 interposed therebetween, is formed by pressing the respective ceramic green sheets 43 and the bonding ceramic sheet 46 in the lamination direction by using a heat block 58 in non-contact with the through holes 55, 56. |
