发明名称 |
High frequency heating apparatus |
摘要 |
A high frequency heating apparatus which heats a substrate by applying high frequency waves thereto. The high frequency heating apparatus includes a high frequency generator which generates high frequency to heat the substrate. The distance from the substrate to the high frequency generator is (n/2)*», where n is a natural number ranging from 1 to 6, and X is the wavelength of the high frequency that is generated by the high frequency generator. |
申请公布号 |
EP2637478(A3) |
申请公布日期 |
2014.01.08 |
申请号 |
EP20130157937 |
申请日期 |
2013.03.06 |
申请人 |
SAMSUNG CORNING PRECISION MATERIALS CO., LTD. |
发明人 |
LEE, HOIKWAN;YOON, KYUNGMIN;CHO, SEO-YEONG |
分类号 |
H05B6/70;C03B23/02;H05B6/78 |
主分类号 |
H05B6/70 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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