| 摘要 |
PROBLEM TO BE SOLVED: To provide a marking apparatus where the distance between a wafer surface and a core or a pot tip can be adjusted so as to be constant for each adjustment of the apparatus. SOLUTION: In a marker 2, when ink in the inkpot is jetted, the core 11 projects outside the pot tip 12. By bringing the projecting core into contact with the surface of a semiconductor wafer 8, the position at which the core starts contact is electrically measured by a measuring apparatus 9, and thus the contact starting position of the core can be obtained. Further, by vertically moving the wafer surface or a marker installation position by a fixed quantity from the position, the distance between the core and the wafer surface can be adjusted so as to be constant.
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