发明名称 CONDUCTIVE STRUCTURES, SYSTEMS AND DEVICES INCLUDING CONDUCTIVE STRUCTURES AND RELATED METHODS
摘要 Conductive structures include a plurality of conductive steps and a contact extending at least partially therethrough in communication with at least one of the plurality of conductive steps and insulated from at least another one of the conductive steps. Devices may include such conductive structures. Systems may include a semiconductor device and a stair step conductive structure having a plurality of contacts extending through a step of the stair step conductive structure. Methods of forming conductive structures include forming contacts in contact holes formed through at least one conductive step of a conductive structure. Methods of forming electrical connections in stair step conductive structures include forming contacts in contact holes formed through each step of the stair step conductive structure.
申请公布号 KR20140000719(A) 申请公布日期 2014.01.03
申请号 KR20137030533 申请日期 2012.05.23
申请人 MICRON TECHNOLOGY, INC. 发明人 SMITH MICHAEL A.;FREEMAN ERIC H.
分类号 H01L21/28;H01L21/8247;H01L27/115 主分类号 H01L21/28
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