发明名称 Shielded gate trench MOSFET with increased source-metal contact
摘要 A semiconductor device formed on a semiconductor substrate having a substrate top surface, includes: a gate trench extending from the substrate top surface into the semiconductor substrate; a gate electrode in the gate trench; a dielectric material disposed over the gate electrode; a body region adjacent to the gate trench; a source region embedded in the body region, at least a portion of the source region extending above the dielectric material; a contact trench that allows contact such as electrical contact between the source region and the body region; and a metal layer disposed over at least a portion of a gate trench opening, at least a portion of the source region, and at least a portion of the contact trench.
申请公布号 US8618601(B2) 申请公布日期 2013.12.31
申请号 US201113016804 申请日期 2011.01.28
申请人 CHEN JOHN;ALPHA AND OMEGA SEMICONDUCTOR INCORPORATED 发明人 CHEN JOHN
分类号 H01L29/66 主分类号 H01L29/66
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