SPEED BUFFER, IN-LINE TYPE SUBSTRATE PROCESSING SYSTEM AND CONTROLLING METHOD THEREFOR

摘要

Disclosed are a speed buffer, a continuous substrate processing system including the same, and a control method thereof. The speed buffer according to an embodiment of the present invention is the speed buffer carrying out a substrate, which is carried inside, by transferring the same in a first direction. The speed buffer includes a first sensor sensing whether the substrate is carried inside or not; a second sensor sensing the position of the substrate which is being transferred in the speed buffer; and a driver controlling rotation speed of a roller transferring a late substrate by corresponding to transfer speed of the late substrate which determines that the late substrate and an advance substrate have a target gap before the advance substrate is completely carried out from the speed buffer.