METHOD FOR DETERMINING PN JUNCTION DEPTH

摘要

A method for determining PN junction depth comprises steps as follows: a) measuring a square resistance in a well region (S101); b) forming a junction type field effect transistor in the well region, changing a gate electrode voltage and measuring a source-drain resistance (S102); c) calculating the PN junction depth according to the measured square resistance, source-drain resistance and relative technical parameters of the junction type field effect transistor (S103). Determining the PN junction depth according to the electrical measurement is simple and feasible, and has better repeatability.