发明名称 DISCHARGE LAMP, CONNECTION CABLE, LIGHT SOURCE DEVICE, AND EXPOSURE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a light source device having a large cooling action to a metal cap member of a discharge lamp.SOLUTION: A connector 41 provided to a power supply 32 and a blow device 34 side and a connector 52 provided to a metal cap side of a discharge lamp 1 are coupled by a coupling cable 57 housing a blow pipe 35A in a power cable 33A. A power from the power supply 32 is supplied to a metal cap part 28 via the power cable 33A of the coupling cable 57, the metal cap side connector 52, and a flow channel folding member 51. A cool air from the blow device 34 is supplied to a groove part 28b of the metal cap part 28 via the blow pipe 35A of the coupling cable 57, and a blow path in the metal cap side connector 52 and the flow channel folding member 51.
申请公布号 JP2013258152(A) 申请公布日期 2013.12.26
申请号 JP20130154630 申请日期 2013.07.25
申请人 NIKON CORP 发明人 KIKUCHI TAKAYUKI;KITANO HIROSHI
分类号 H01J5/50;F21Y101/00;G03F7/20;H01L21/027 主分类号 H01J5/50
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