发明名称 A METHOD FOR CLEANING A MICROCHIP WITH ELECTRODES AND MICROCHANNELS
摘要 The present invention relates to a chip with an electrode and a microchannel. In a manufacturing method for the chip with an electrode and a microchannel, included is a step of preparing a chip with at least some electrodes in a microchannel; a step of cleaning the inside of the chip by flowing an organic solvent through the microchannel; a step of electro-chemically cleaning the exposed electrodes' surfaces in the microchannel with an acid solution; and a method for cleaning the exposed portion of the electrodes and the exposed electrodes' surfaces in the microchannel is electro-chemically cleaned by applying a voltage to the electrodes in the acid solution. [Reference numerals] (AA) Current (1e-6A);(BB) Voltage (V)
申请公布号 KR20130141032(A) 申请公布日期 2013.12.26
申请号 KR20120064103 申请日期 2012.06.15
申请人 SNU R&DB FOUNDATION 发明人 CHUNG, TAEK DONG;KANG, CHUNG MU
分类号 H01L21/302 主分类号 H01L21/302
代理机构 代理人
主权项
地址