发明名称 |
A METHOD FOR CLEANING A MICROCHIP WITH ELECTRODES AND MICROCHANNELS |
摘要 |
The present invention relates to a chip with an electrode and a microchannel. In a manufacturing method for the chip with an electrode and a microchannel, included is a step of preparing a chip with at least some electrodes in a microchannel; a step of cleaning the inside of the chip by flowing an organic solvent through the microchannel; a step of electro-chemically cleaning the exposed electrodes' surfaces in the microchannel with an acid solution; and a method for cleaning the exposed portion of the electrodes and the exposed electrodes' surfaces in the microchannel is electro-chemically cleaned by applying a voltage to the electrodes in the acid solution. [Reference numerals] (AA) Current (1e-6A);(BB) Voltage (V) |
申请公布号 |
KR20130141032(A) |
申请公布日期 |
2013.12.26 |
申请号 |
KR20120064103 |
申请日期 |
2012.06.15 |
申请人 |
SNU R&DB FOUNDATION |
发明人 |
CHUNG, TAEK DONG;KANG, CHUNG MU |
分类号 |
H01L21/302 |
主分类号 |
H01L21/302 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|