发明名称
摘要 When a lid (20) is attached to a substrate removal/insertion opening (2) in a container body (1), a placement piece forcible displacement means (22) forcibly moves a substrate placement piece (4), which is provided in a region in the vicinity of the substrate removal/insertion opening (2), to a displacement position which does not overlap with a disc-shaped substrate (W). Thus, even if the disc-shaped substrate (W) is increased in diameter, there is no risk of the stored disc-shaped substrate (W) coming into contact with the substrate placement piece (4) due to factors such as vibration or impact, thus the disc-shaped substrate (W) can be stored more safely.
申请公布号 JP5374640(B2) 申请公布日期 2013.12.25
申请号 JP20120511437 申请日期 2010.04.20
申请人 发明人
分类号 H01L21/673;B65D85/86 主分类号 H01L21/673
代理机构 代理人
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