发明名称 |
Process control using analysis of an upstream process |
摘要 |
A method, apparatus and a system, for performing a process control using analysis of an upstream process is provided. The method comprises performing a first process on a workpiece and performing a qualitative analysis upon the workpiece relating to the first process, the qualitative analysis comprises analyzing at least one metrology measurement relating to the first process and a workpiece feature to evaluate a characteristic of the workpiece. The method further comprises selecting a process control parameter for performing a second process upon the workpiece based upon the qualitative analysis. |
申请公布号 |
US8615314(B1) |
申请公布日期 |
2013.12.24 |
申请号 |
US20040932989 |
申请日期 |
2004.09.02 |
申请人 |
SONDERMAN THOMAS J.;BODE CHRISTOPHER A.;PASADYN ALEXANDER J.;ADVANCED MICRO DEVICES, INC. |
发明人 |
SONDERMAN THOMAS J.;BODE CHRISTOPHER A.;PASADYN ALEXANDER J. |
分类号 |
G05B13/02 |
主分类号 |
G05B13/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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